| 产品编号：Km-929 |
| 产品名称：四乙氧基硅烷(电子级） |
| Cas No.：78-10-4 |
| 分子式：C4H12O4Si |
| 含 量：99.9% Min. |
Appearance:Colorless transparent liquid
Assay:99.9% Min.
Total cation:1ppm Max.
Total Cl-:0.5ppm Max.
Density(g/cm3,20’C):0.915-0.945
Refractive index(25℃):1.3750-1.3900
Application:
It’s mainly used for CVD manufacturing in the wafer manufacturing process. Used for producing silicon dioxide thin films, it is a semiconductor Discrete components, electronic chemicals required for the manufacturing of microelectromechanical systems.
It’s used as chlorine free or ultra-low chlorine insulation and heat-resistant materials.
It’s used for manufacturing high-quality grinding particles in the semiconductor industry. |
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